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Comparison of retention characteristics of Pb(Zr,Ti)O3(PZT) capacitors fabricated with noble metal electrodes and their oxide electrodes

Title
Comparison of retention characteristics of Pb(Zr,Ti)O3(PZT) capacitors fabricated with noble metal electrodes and their oxide electrodes
Author
강보수
Keywords
FeRAM; retention; PZT; Pt; Ir; IrO2; noble metal; oxide electrode; interface; THIN-FILM CAPACITORS; POLARIZATION RETENTION; DEPOSITION
Issue Date
2004-08
Publisher
TAYLOR & FRANCIS LTD
Citation
INTEGRATED FERROELECTRICS, v. 64, No. 1, Page. 169-181
Abstract
We compared retention characteristics of Pb(Zr,Ti)O3 (PZT) capacitors with either noble metal electrodes or their oxide compounds. Very thin PZT films with thickness below 100 nm were deposited by metal-organic chemical vapor deposition (MOCVD) on Ir bottom electrodes, and Pt, Ir, IrO2 were covered as top electrodes thereon. The capacitors with IrO2 top electrodes had the better opposite-state retention performance than those with Pt, Ir top electrodes. Inserting IrO2 top electrode affected the alleviation of the size effect more in the aged capacitors than in the virgin capacitors. In addition, we also discuss problems of using IrO2 as a bottom electrode in our PZT capacitors.
URI
https://www.tandfonline.com/doi/full/10.1080/10584580490894177https://repository.hanyang.ac.kr/handle/20.500.11754/151073
ISSN
1058-4587; 1607-8489
DOI
10.1080/10584580490894177
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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