이산화 타이타늄 입자가 코팅된 3차원 탄소나노튜브 망 구조체의 암모니아 가스센서 응용에 대한 연구

Abstract

Ammonia (NH3) gas is a one of gases which damages to environment such as acidification and climate change. Three-dimensional hierarchical structures have been introduced as efficient structures for gas sensor application due to large surface areas and fast gas diffusion. There are many methods to fabricate nanostructure such as photolithography, EUV lithography and capillary force lithography. Among these lithography techniques, capillary force lithography is a versatile and cost effective. In this study, the three dimensional structure was fabricated by capillary force lithography on quartz substrate. To enhance the sensitivity of gas sensor, SWNTs were synthesized on the structure due to the whole surface of SWNTs can absorb gas molecules and quick gas diffusion and it called as three- dimensional network of single-walled carbon nanobutes (3D Network of SWNTS). Atomic layer deposition is a superior method to deposit material on complex structure because it has good step coverage and its thickness can be controlled as angstrom level. Therefore ALD is a good deposition method to this structure. To increase SWNTs gas sensor performance, TiO2 deposited on 3D Network of SWNTs uniformly. TiO2 3D Network of SWNTs shows enhancement of gas sensor performance to NH3 gas.