86 0

ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS

Title
ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS
Author
이성환
Keywords
MRR; nanofinishing; magnetic abrasive finishing; IZO-coated Pyrex glass; AFM nanoindentation; acoustic emission
Issue Date
2017-11
Publisher
WORLD SCIENTIFIC PUBL CO PTE LTD
Citation
Surface Review and Letters, v. 24, Article no. 1850004
Abstract
The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, the MRR or wear rate is closely related to the material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, the prediction and in-process monitoring of the MRR is necessary, because the process is not characterizable due to size effects and material property/process condition variations as a result of the coating/substrate interactions. The purpose of this research was to develop a practical methodology for the prediction and in-process monitoring of MRR during nanoscale finishing of coated surfaces. Using a specially designed magnetic abrasive finishing (MAF) and acoustic emission (AE) monitoring setup, experiments were carried out on indium-zinc-oxide (IZO) coated Pyrex glasses. After a given polishing time interval, AFM indentation was conducted for each workpiece sample to measure the adhesion force variations of the coating layers (IZO), which are directly related to the MRR changes. The force variation and AE monitoring data were compared to the MRR calculated form the surface measurement (Nanoview) results. The experimental results demonstrate strong correlations between AFM indentation and MRR measurement data. In addition, the monitored AE signals show sensitivity of the material structure variations of the coating layer, as the polishing progresses.
URI
https://repository.hanyang.ac.kr/handle/20.500.11754/131972https://www.worldscientific.com/doi/abs/10.1142/S0218625X1850004X
ISSN
0218-625X
DOI
10.1142/S0218625X1850004X
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE