실리콘산화막 기둥에 배열된 단일벽 탄소나노튜브를 이용한 가스센서

Abstract

Gas sensors are installed various places and play an important role in monitoring hazardous substances and pollutants in the atmosphere and the environment. Ammonia gas is one of the gasses which damages to environments such as acidification and air pollution. It confirmed that the bridging and connecting of SWNTs between Si pillars, suggesting the effective growth of the three dimensional (3-D) SWNTs on Si pillar architecture for application to gas sensor devices. Experiments were conducted with the performance of gas sensor composed of this structure while changing NH3 gas injection time, before NH3 exposure and after, flow rate, and the following results were obtained. It was possible to confirm the resilience, reproducibility and high sensitivity of NH3. The suspended(3-D) SWNTs is superior to mat(2-D) SWNTs under the same condition. Because three-dimensional(3-D) carbon nanotube networks can rapidly absorb gasses by a large surface area. And conversely, It can recover more quickly with a large surface area.