Modified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor
- Title
- Modified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor
- Other Titles
- 변형 부유 고조화법
- Author
- 서종인
- Alternative Author(s)
- 서종인
- Advisor(s)
- 정진욱
- Issue Date
- 2020-02
- Publisher
- 한양대학교
- Degree
- Master
- Abstract
- The floating harmonic method (FHM) is a diagnostic method to obtain plasma parameters by analyzing harmonic currents of driving frequency to a probe. In the FHM, the harmonic currents are measured through a sensing resistor and a DC floating potential is maintained by a DC blocking capacitor.
In this thesis, the current sensing resistor is eliminated by modifying FHM’s measurement circuit, and the DC blocking capacitor is used for measuring the harmonic currents. Since there is no voltage drop across the sensing resistor, compensation of sheath voltage is not necessary.
In this method, plasma densities and electron temperatures are measured in argon Inductively coupled plasma and the results are compared with those obtained from electron energy probability functions.
- URI
- https://repository.hanyang.ac.kr/handle/20.500.11754/123301http://hanyang.dcollection.net/common/orgView/200000436967
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > NANOSCALE SEMICONDUCTOR ENGINEERING(나노반도체공학과) > Theses (Master)
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