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dc.contributor.advisor정진욱-
dc.contributor.author서종인-
dc.date.accessioned2020-02-11T03:06:49Z-
dc.date.available2020-02-11T03:06:49Z-
dc.date.issued2020-02-
dc.identifier.urihttp://dcollection.hanyang.ac.kr/common/orgView/000000111685en_US
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/123301-
dc.description.abstractThe floating harmonic method (FHM) is a diagnostic method to obtain plasma parameters by analyzing harmonic currents of driving frequency to a probe. In the FHM, the harmonic currents are measured through a sensing resistor and a DC floating potential is maintained by a DC blocking capacitor. In this thesis, the current sensing resistor is eliminated by modifying FHM’s measurement circuit, and the DC blocking capacitor is used for measuring the harmonic currents. Since there is no voltage drop across the sensing resistor, compensation of sheath voltage is not necessary. In this method, plasma densities and electron temperatures are measured in argon Inductively coupled plasma and the results are compared with those obtained from electron energy probability functions.-
dc.publisher한양대학교-
dc.titleModified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor-
dc.title.alternative변형 부유 고조화법-
dc.typeTheses-
dc.contributor.googleauthorSeo, Jong In-
dc.contributor.alternativeauthor서종인-
dc.sector.campusS-
dc.sector.daehak대학원-
dc.sector.department나노반도체공학과-
dc.description.degreeMaster-
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > NANOSCALE SEMICONDUCTOR ENGINEERING(나노반도체공학과) > Theses (Master)
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