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Modified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor

Title
Modified floating harmonic method by analyzing harmonic currents of a DC blocking capacitor
Other Titles
변형 부유 고조화법
Author
서종인
Alternative Author(s)
서종인
Advisor(s)
정진욱
Issue Date
2020-02
Publisher
한양대학교
Degree
Master
Abstract
The floating harmonic method (FHM) is a diagnostic method to obtain plasma parameters by analyzing harmonic currents of driving frequency to a probe. In the FHM, the harmonic currents are measured through a sensing resistor and a DC floating potential is maintained by a DC blocking capacitor. In this thesis, the current sensing resistor is eliminated by modifying FHM’s measurement circuit, and the DC blocking capacitor is used for measuring the harmonic currents. Since there is no voltage drop across the sensing resistor, compensation of sheath voltage is not necessary. In this method, plasma densities and electron temperatures are measured in argon Inductively coupled plasma and the results are compared with those obtained from electron energy probability functions.
URI
http://dcollection.hanyang.ac.kr/common/orgView/000000111685https://repository.hanyang.ac.kr/handle/20.500.11754/123301
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > NANOSCALE SEMICONDUCTOR ENGINEERING(나노반도체공학과) > Theses (Master)
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