Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김태곤 | - |
dc.date.accessioned | 2020-01-20T02:35:56Z | - |
dc.date.available | 2020-01-20T02:35:56Z | - |
dc.date.issued | 2019-10 | - |
dc.identifier.citation | MICROELECTRONIC ENGINEERING, v. 218, Article no. 111133 | en_US |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.issn | 1873-5568 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0167931719302898 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/122037 | - |
dc.description.abstract | This research investigates abrasive particles agglomeration via interaction between O-2 bubbles and slurry abrasives during the tungsten chemical mechanical polishing (W CMP) process. The abrasive particles in slurry were highly agglomerated due to higher volumes of O-2 bubbles produced in the reaction between the catalyst Fe (NO3)8(3) and the oxidizer H2O2. Results obtained from a gas pressure sensor confirmed the generation of higher O-2 volume via the decomposition of H2O2 at a high catalyst concentration and an increase in reaction temperature. The decomposed O-2 volume rate at 80 degrees C was reported at the maximum value of 2.0 x 10(-2) L/s at 120 ppm as compared to the moderate and minimum rates of 3.5 x 10(-3) and 3.2 x 10(-4) L/s for catalyst concentrations of 60 and 30 ppm, respectively. Images of O-2 bubbles, captured using a high-speed camera, exhibited subsequent enhancement in average O-2 bubble diameters of 91, 427, and 503 mu m at 25, 60, and 80 degrees C, respectively. Analysis of surface scans confirmed large abrasive particles contamination on the TEOS wafer with an increase in the O-2 bubble flow rate and bubbling time. Also, large abrasive particles agglomeration was observed in the presence of O-2 bubbles as compared to no bubbles, as measured by dynamic light scattering DLS. It is believed that higher hydrophilicity of abrasive particles with O-2 bubbles increased the adhesive force between the abrasive particles and the in-situ generated O-2 bubbles. The high drag force generated during the collapse of O-2 bubbles is essentially attributed a strong attractive force between the abrasive particles and the TEOS wafer which strongly binds with the abrasive particles and intensifies the defect level as particle agglomeration. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE BV | en_US |
dc.subject | W CMP | en_US |
dc.subject | O-2 bubble | en_US |
dc.subject | Fe(NO3)(3) | en_US |
dc.subject | Large abrasive particles ratio | en_US |
dc.subject | Abrasive particles agglomeration | en_US |
dc.title | Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process | en_US |
dc.type | Article | en_US |
dc.relation.volume | 218 | - |
dc.identifier.doi | 10.1016/j.mee.2019.111133 | - |
dc.relation.page | 111133-111137 | - |
dc.relation.journal | MICROELECTRONIC ENGINEERING | - |
dc.contributor.googleauthor | Jeong, Yeon-Ah | - |
dc.contributor.googleauthor | Poddar, Maneesh Kumar | - |
dc.contributor.googleauthor | Ryu, Heon-Yul | - |
dc.contributor.googleauthor | Yerriboina, Nagendra Prasad | - |
dc.contributor.googleauthor | Kim, Tae-Gon | - |
dc.contributor.googleauthor | Kim, Jaehyun | - |
dc.contributor.googleauthor | Park, Jong-Dai | - |
dc.contributor.googleauthor | Lee, Mingun | - |
dc.contributor.googleauthor | Park, Chang-Yong | - |
dc.contributor.googleauthor | Han, Seongjun | - |
dc.contributor.googleauthor | Kim, Myeong-Jun | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2019002909 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DIVISION OF SMART CONVERGENCE ENGINEERING | - |
dc.identifier.pid | tgon | - |
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