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High‐Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition

Title
High‐Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition
Author
좌용호
Keywords
atomic layer deposition; gas sensor; hydrogen; oxide heterostructure; thin film
Issue Date
2019-02
Publisher
WILEY-V C H VERLAG GMBH
Citation
ADVANCED FUNCTIONAL MATERIALS, v. 29, No. 7, Article no. 1807760
Abstract
A high-performance, transparent, and extremely thin (<15 nm) hydrogen (H-2) gas sensor is developed using 2D electron gas (2DEG) at the interface of an Al2O3/TiO2 thin film heterostructure grown by atomic layer deposition (ALD), without using an epitaxial layer or a single crystalline substrate. Palladium nanoparticles (approximate to 2 nm in thickness) are used on the surface of the Al2O3/TiO2 thin film heterostructure to detect H-2. This extremely thin gas sensor can be fabricated on general substrates such as a quartz, enabling its practical application. Interestingly, the electron density of the Al2O3/TiO2 thin film heterostructure can be tailored using ALD process temperature in contrast to 2DEG at the epitaxial interfaces of the oxide heterostructures such as LaAlO3/SrTiO3. This tunability provides the optimal electron density for H-2 detection. The Pd/Al2O3/TiO2 sensor detects H-2 gas quickly with a short response time of <30 s at 300 K which outperforms conventional H-2 gas sensors, indicating that heating modules are not required for the rapid detection of H-2. A wide bandgap (>3.2 eV) with the extremely thin film thickness allows for a transparent sensor (transmittance of 83% in the visible spectrum) and this fabrication scheme enables the development of flexible gas sensors.
URI
https://onlinelibrary.wiley.com/doi/full/10.1002/adfm.201807760https://repository.hanyang.ac.kr/handle/20.500.11754/121710
ISSN
1616-301X; 1616-3028
DOI
10.1002/adfm.201807760
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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