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Multipoint scanning dual-detection confocal microscopy for fast 3D volumetric measurement

Title
Multipoint scanning dual-detection confocal microscopy for fast 3D volumetric measurement
Author
유홍기
Keywords
Confocal microscopy; fast imaging; height measurements; surface measurement; three-dimensional microscopy
Issue Date
2018-05
Publisher
WILEY
Citation
JOURNAL OF MICROSCOPY, v. 270, no. 2, page. 200-209
Abstract
We propose a multipoint scanning dual-detection confocal microscopy (MS-DDCM) system for fast 3D volumetric measurements. Unlike conventional confocal microscopy, MS-DDCM can accomplish surface profiling without axial scanning. Also, to rapidly obtain 2D images, the MS-DDCM employs a multipoint scanning technique, with a digital micromirror device used to produce arrays of effective pinholes, which are then scanned. The MS-DDCM is composed of two CCDs: one collects the conjugate images and the other collects nonconjugate images. The ratio of the axial response curves, measured by the two detectors, provides a linear relationship between the height of the sample surface and the ratio of the intensity signals. Furthermore, the difference between the two images results in enhanced contrast. The normalising effect of the MS-DDCM provides accurate sample heights, even when the reflectance distribution of the surface varies. Experimental results confirmed that the MS-DDCM achieved high-speed surface profiling with improved image contrast capability.
URI
https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12674https://repository.hanyang.ac.kr/handle/20.500.11754/118814
ISSN
0022-2720; 1365-2818
DOI
10.1111/jmi.12674
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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