TaCl5-C3H6-H2 계에서 TaC CVD 공정의 열역학 해석
- Title
- TaCl5-C3H6-H2 계에서 TaC CVD 공정의 열역학 해석
- Other Titles
- Thermodynamic Prediction of TaC CVD Process in TaCl5-C3H6-H2 System
- Author
- 심광보
- Keywords
- tantalum carbide; erosion of C/C composite; thermodynamic analysis; chemical vapor deposition
- Issue Date
- 2018-02
- Publisher
- 한국재료학회
- Citation
- 한국재료학회지, v. 28, no. 2, page. 75-81
- Abstract
- An ultra-high temperature ceramic, tantalum carbide, has received much attention for its favorable characteristics: a superior melting point and chemical compatibility with carbon and other carbides. One drawback is the high temperature erosion of carbon/carbon (C/C) composites. To address this drawback, we deposited TaC on C/C with silicon carbide as an intermediate layer. Prior to the TaC deposition, the TaCl5-C3H6-H2 system was thermodynamically analyzed with FactSage 6.2 and compared with the TaCl5-CH4-H2 system. The results confirmed that the TaCl5-C3H6-H2 system had a more realistic cost and deposition efficiency than TaCl5-CH4-H2. A dense and uniform TaC layer was successfully deposited under conditions of Ta/C = 0.5, 1200 oC and 100 torr. This study verified that the thermodynamic analysis is appropriate as a guide and prerequisite for carbide deposition.
- URI
- http://journal.mrs-k.or.kr/journal/article.php?code=59025https://repository.hanyang.ac.kr/handle/20.500.11754/117302
- ISSN
- 1225-0562; 2287-7258
- DOI
- 10.3740/MRSK.2018.28.2.75
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
- Files in This Item:
- TaCl5-C3H6-H2 계에서 TaC CVD 공정의 열역학 해석.pdfDownload
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