Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
- Title
- Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
- Author
- 송석호
- Keywords
- LIGHT; TRANSMISSION
- Issue Date
- 2018-01
- Publisher
- NATURE PUBLISHING GROUP
- Citation
- NATURE ELECTRONICS, v. 1, no. 1, page. 60-67
- Abstract
- Advances in nanophotonics and plasmonics have led to the creation of a variety of innovative optical components and devices. However, the development of powerful practical applications has so far been limited. Here we show that subsurface defects in three-dimensional NAND flash memory devices can be identified by exploiting the inherent hyperbolic metamaterial structure of the devices and associated nanophotonic interactions, such as the epsilon-near-zero effect and hyperbolic Bloch mode formation. By incorporating a hyperspectral imaging scheme into an industrial optical inspection tool, we experimentally demonstrate that a diffraction-assisted volume-plasmonic resonance provides a robust mechanism for identifying subsurface defects at a depth that is around ten times deeper than the conventional optical skin depth limit. Further spectral analysis in the longer-wavelength infrared region shows clear hyperbolic guided-mode-resonance signatures that would potentially allow defect identification over the entire device depth and on the scale of multiple micrometres.
- URI
- https://www.nature.com/articles/s41928-017-0007-7https://repository.hanyang.ac.kr/handle/20.500.11754/117115
- ISSN
- 2520-1131
- DOI
- 10.1038/s41928-017-0007-7
- Appears in Collections:
- COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML