Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2019-11-29T21:53:42Z | - |
dc.date.available | 2019-11-29T21:53:42Z | - |
dc.date.issued | 2017-08 | - |
dc.identifier.citation | MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, v. 222, page. 1-6 | en_US |
dc.identifier.issn | 0921-5107 | - |
dc.identifier.issn | 1873-4944 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0921510717300880?via%3Dihub | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/115274 | - |
dc.description.abstract | The present study investigated the removal of contaminated particles from a polished N-polar GaN surface using an alkaline cleaning solution along with sodium dodecyl sulfate (SDS) surfactant. The zeta potential, etch rate, and particle removal efficiency (PRE) of N-polar GaN surfaces were reported. A lower etch rate and smoother N-polar GaN surface were obtained when the surface is treated with a diluted NH4OH solution. However, the etch rate and PRE of the N-polar GaN surface increased as a function of the pH of the NH4OH solution. The PRE of the N-polar GaN surface reached to 96% at pH 10 with a high surface roughness of 0.5 nm. SDS was added to the ammonia solutions to control the surface roughness. The N-polar GaN surface reached 100% PRE and surface roughness shown less than 0.4 nm when cleaned in a diluted NH4OH solution with 5 mM SDS surfactant in a megasonic bath. (C) 2017 Elsevier B.V. All rights reserved. | en_US |
dc.description.sponsorship | This work was supported by the Future Semiconductor Device Technology Development Program #10045366 funded By MOTIE (Ministry of Trade, Industry & Energy) and KSRC (Korea Semiconductor Research Consortium). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE BV | en_US |
dc.subject | N-polar GaN surface | en_US |
dc.subject | Wafer bonding | en_US |
dc.subject | Particle removal efficiency (PRE) | en_US |
dc.subject | Surface roughness | en_US |
dc.subject | Sodium dodecyl sulfate (SDS) | en_US |
dc.title | Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution | en_US |
dc.type | Article | en_US |
dc.relation.volume | 222 | - |
dc.identifier.doi | 10.1016/j.mseb.2017.04.003 | - |
dc.relation.page | 1-6 | - |
dc.relation.journal | MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | - |
dc.contributor.googleauthor | Kim, Min-Su | - |
dc.contributor.googleauthor | Paluvai, Nagarjuna Reddy | - |
dc.contributor.googleauthor | Kim, Hyun-Tae | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2017002446 | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | jgpark | - |
dc.identifier.researcherID | P-4051-2019 | - |
dc.identifier.orcid | http://orcid.org/0000-0002-8008-6478 | - |
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