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Determining the machining parameters for femtosecond laser helical drilling of aluminosilicate glass substrate

Title
Determining the machining parameters for femtosecond laser helical drilling of aluminosilicate glass substrate
Author
문승재
Keywords
Glass; Drilling; Femotosecond laser
Issue Date
2017-07
Publisher
KOREAN SOC PRECISION ENG
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v. 18, no. 7, page. 923-930
Abstract
In this work, a new laser helical drilling method with high geometrical accuracy is proposed for aluminosilicate glass (ASG) substrates. Laser drilling was performed from the bottom of the substrate to reduce the taper angle. The 400 mu m-thick ASG substrates were drilled via a femtosecond laser beam with a wavelength of 1552 nm and a pulse duration of 800 fs. By applying this newly suggested method, thru-holes can be produced with a high roundness accuracy that is less than 20 mu m, a small taper angle, low surface roughness of the sidewall, and high quality laser-drilled edges without cracks or chippings for hole diameters of 0.5, 1, 2, and 3 mm. Correlations are proposed between laser drilling parameters, such as ablation depth, scanning speed, vertical motion speed, and helical layer pitch, each of which are critical variables in drilling thru-holes in ASG substrates. Good surface quality of thru-holes can be experimentally obtained using the machining parameter values estimated by the proposed theory.
URI
https://link.springer.com/article/10.1007%2Fs12541-017-0109-1https://repository.hanyang.ac.kr/handle/20.500.11754/114879
ISSN
2234-7593; 2005-4602
DOI
10.1007/s12541-017-0109-1
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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