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Effects of Post-Annealing on the Magnetic Properties of FeCoBN Thin film

Title
Effects of Post-Annealing on the Magnetic Properties of FeCoBN Thin film
Author
김종렬
Keywords
FeCoBN; microstructure; post-annealing; soft magnetism
Issue Date
2005-10
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON MAGNETICS, v. 41, No. 10, Page. 3277-3279
Abstract
Below a critical thickness (similar to 100 nm), FeCoBN thin films showed excellent soft magnetic properties and high-frequency characteristics. However, it was found that the residual stress sharply degraded their properties over the critical thickness. In order to overcome this limit, magnetic post-annealing process has been carried out in this experiment. The microstructural analysis showed that the annealing effectively removed the residual stress of FeCoBN films without any microstructural changes. This removal improved the soft magnetic properties and high-frequency characteristics of the films of which the thickness was over the critical thickness.
URI
https://ieeexplore.ieee.org/document/1519278https://repository.hanyang.ac.kr/handle/20.500.11754/111726
ISSN
0018-9464
DOI
10.1109/TMAG.2005.854901
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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