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Application of Data Mining for Improving Yield in Wafer Fabrication System

Title
Application of Data Mining for Improving Yield in Wafer Fabrication System
Author
한창희
Keywords
Control Chart; Data Mining Technique; Process Capability Index; Wafer Fabrication; Statistical Quality Control
Issue Date
2005-05
Publisher
SPRINGER-VERLAG BERLIN
Citation
International Conference on Computational Science and Its Applications; Computational Science and Its Applications – ICCSA 2005, Page. 222-231
Abstract
This paper presents a comprehensive and successful application of data mining methodologies to improve wafer yield in a semiconductor wafer fabrication system. To begin with, this paper applies a clustering method to automatically identify AUF (Area Uniform Failure) phenomenon from data instead of visual inspection that bad chips occurs in a specific area of wafer. Next, sequential pattern analysis and classification methods are applied to find out machines and parameters that are cause of low yield, respectively. Finally, this paper demonstrates an information system, Y2R-PLUS (Yield Rapid Ramp-up, Prediction, analysis & Up Support) that is developed in order to analyze wafer yield in a Korea semiconductor manufacturer.
URI
https://link.springer.com/chapter/10.1007/11424925_25https://repository.hanyang.ac.kr/handle/20.500.11754/110629
ISBN
978-3-540-25863-6
DOI
10.1007/11424925_25
Appears in Collections:
COLLEGE OF BUSINESS AND ECONOMICS[E](경상대학) > BUSINESS ADMINISTRATION(경영학부) > Articles
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