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Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique

Title
Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique
Author
좌용호
Keywords
CRYSTALLINE ORIENTATION; ELECTRICAL PROPERTY; LEAD-FREE FERROELECTRIC MATERIALS; LIQUID SPRAYED MISTED CHEMICAL VAPOR DEPOSITION METHOD
Issue Date
2006-11
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v. 6, No. 11, Page. 3479-3482
Abstract
This study aims to synthesize lead-free ferroelectric material, (Bi1/2Na1/2)TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi1/2Na1/2)TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2P(r)) and the dielectric constant were 4.6-16.8 mu C/cm(2), 325-350, respectively.
URI
https://www.ingentaconnect.com/contentone/asp/jnn/2006/00000006/00000011/art00039https://repository.hanyang.ac.kr/handle/20.500.11754/108872
ISSN
1533-4880; 1533-4899
DOI
10.1166/jnn.2006.038
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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