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AE를 이용한 AFM 연성 영역 가공 특성 연구

Title
AE를 이용한 AFM 연성 영역 가공 특성 연구
Other Titles
Characteristic of Ductile Regime AFM Machining Using Acoustic Emission
Author
이성환
Keywords
Acoustic Emission(음향 방출); Ductile/brittle transition(연성/취성 전이); Nano machining(나노 가공)
Issue Date
2006-08
Publisher
한국생산제조학회
Citation
한국공작기계학회 논문집, v. 15, No. 4, Page. 15 - 21
Abstract
Recently, atomic force microscope(AFM) with suitable tips is being used for nano fabrication/nanometric machining purposes. In this paper, acoustic emission(AE) was introduced to monitor the nanometric machining of brittle materials(silicon) using AFM. In the experiments, AE responses were sampled, as the tip load was linearly increased(ramped load), to investigate the machining characteristics during a continuous movement. By analyzing the experimental results, it can be concluded that measured AE energy is sensitive to changes in the mechanism of material removal including the ductile-brittle transition during the nanometric machining. The critical depth of cut value for the transition is evaluated and discussed.
URI
http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00925867&language=ko_KRhttps://repository.hanyang.ac.kr/handle/20.500.11754/108410
ISSN
2508-5093
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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