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웨이퍼 본딩을 이용한 탐침형 정보 저장장치용 압전 켄틸레버 어레이

Title
웨이퍼 본딩을 이용한 탐침형 정보 저장장치용 압전 켄틸레버 어레이
Other Titles
Thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for probe-based data storage using wafer-Lever transfer method
Author
이선영
Keywords
Thermo-piezoelectric Si3N4 cantilever; PZT; probe-based data storage; wafer Lever transfer
Issue Date
2006-06
Publisher
정보저장시스템학회
Citation
정보저장시스템학회논문집, v. 2, No. 2, Page. 96-99
Abstract
In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data stroage. The transferred cantilevers were silicon nitride cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric Si3N4 cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric Si3N4 cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo- piezoelectric Si3N4 cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5 nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric SI3N4 cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.
URI
http://kiss.kstudy.com/thesis/thesis-view.asp?key=3065602https://repository.hanyang.ac.kr/handle/20.500.11754/108246
ISSN
1738-6845
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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