Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)ROBOT ENGINEERING(로봇공학과)Articles
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에어베어링을 이용한 초정밀 회전 스테이지의 반경방향 오차 분석
- Title
- 에어베어링을 이용한 초정밀 회전 스테이지의 반경방향 오차 분석
- Other Titles
- The Analysis of Radial Error Motion in Precision Rotary Stage Using Air-Bearing
- Author
- 한창수
- Keywords
- Air-Bearing; Error Motion; Runout; Reversal method
- Issue Date
- 2007-11
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 2007년도 추계학술대회 논문집, Page. 35 - 36
- URI
- http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01209547&language=ko_KRhttps://repository.hanyang.ac.kr/handle/20.500.11754/107377
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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