243 0

A Multibody-based Dynamic Simulation Method for electrostatic actuators

Title
A Multibody-based Dynamic Simulation Method for electrostatic actuators
Author
배대성
Keywords
electromechanical coupling; multibody dynamics; recursive dynamics formula; electrostatic actuator; point charge; dynamic behavior
Issue Date
2007-10
Publisher
SPRINGER
Citation
NONLINEAR DYNAMICS, v. 54, No. 1-2, Page. 53-68
Abstract
A numerical simulation method is developed to analyze the dynamic responses of electrostatic actuators, which are electromechanically-coupled systems. The developed method can be used to determine the dynamic responses of cantilever-type switches, which are an example of typical MEMS (Micro-Electro-Mechanical System) devices driven by an electrostatic force. We propose the approach that adopts a point charge to deal with electric field effects between electrodes. This approach may be considered as a lumped parameter model for the electrostatic interactions. An advantage of this model may be the easy incorporation of the electrostatic effects between electrodes into a multibody dynamics analysis algorithm. The resulting equations contain the variables for position, velocity, and electric charge to describe the motion of the masses and the charges on the electrodes in a system. By solving these equations simultaneously, the dynamic response of an electrostatically-driven system can be correctly simulated. In order to realize this approach, we implement the procedures into RecurDyn, the multibody dynamics software developed by the authors. The developed numerical simulation tool was evaluated by applying it to cantilever-type electrostatic switches in many different driving conditions. The results suggest that the developed tool may be useful for predicting behaviors of electrostatic actuators in testing as well as in design.
URI
https://link.springer.com/article/10.1007/s11071-007-9268-4https://repository.hanyang.ac.kr/handle/20.500.11754/106911
ISSN
0924-090X
DOI
10.1007/s11071-007-9268-4
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE