Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
- Title
- Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
- Author
- 오혜근
- Keywords
- ellipsometry; image; dual-rotation; calibration; imaging ellipsometer
- Issue Date
- 2007-08
- Publisher
- INST PURE APPLIED PHYSICS
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 46, No. 8A, Page. 5326-5330
- Abstract
- Imaging ellipsometry is developed in the dual-rotation mode of a polarizer and an analyzer. In this system, the polarizer and analyzer are rotated by a stepping motor at 1 : 1 ratio and the offset between the azimuths of both elements is kept constant. For data reduction, a two-dimensional array detector collects multiple intensity images during rotation and waveform analysis is performed for each pixel. This system generates second and fourth harmonics in intensity waveform and {A, psi} images are deduced from the amplitudes of these harmonics without considering their phases, which leads to calibration-free imaging ellipsometry. This system works well with an offset between two elements but it becomes less susceptible to an offset-setting error with a smaller offset. Besides the ease of operation, this system is simple to construct as no complicated control mechanism is required for each component.
- URI
- https://iopscience.iop.org/article/10.1143/JJAP.46.5326https://repository.hanyang.ac.kr/handle/20.500.11754/106830
- ISSN
- 0021-4922
- DOI
- 10.1143/JJAP.46.5326
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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