Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조남규 | - |
dc.date.accessioned | 2019-06-11T05:00:34Z | - |
dc.date.available | 2019-06-11T05:00:34Z | - |
dc.date.issued | 2007-04 | - |
dc.identifier.citation | REVIEW OF SCIENTIFIC INSTRUMENTS, v. 78, No. 4, Page. 045102 | en_US |
dc.identifier.issn | 0034-6748 | - |
dc.identifier.uri | https://aip.scitation.org/doi/abs/10.1063/1.2719622 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/106405 | - |
dc.description.abstract | This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 mu N to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | MECHANICAL-PROPERTIES | en_US |
dc.subject | MICROSCOPE | en_US |
dc.subject | NANOINDENTATION | en_US |
dc.subject | LITHOGRAPHY | en_US |
dc.subject | DESIGN | en_US |
dc.subject | TESTER | en_US |
dc.subject | STAGE | en_US |
dc.subject | FILMS | en_US |
dc.title | Development of a precision indentation and scratching system with a tool force and displacement control module | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1063/1.2719622 | - |
dc.relation.journal | REVIEW OF SCIENTIFIC INSTRUMENTS | - |
dc.contributor.googleauthor | Park, Jae-jun | - |
dc.contributor.googleauthor | Kwon, Kihwan | - |
dc.contributor.googleauthor | Bang, Jinhyeok | - |
dc.contributor.googleauthor | Cho, Nahmgyoo | - |
dc.contributor.googleauthor | Han, Chang-soo | - |
dc.contributor.googleauthor | Choi, Nak-sam | - |
dc.relation.code | 2007208268 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | ngcho | - |
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