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Development of a precision indentation and scratching system with a tool force and displacement control module

Title
Development of a precision indentation and scratching system with a tool force and displacement control module
Author
조남규
Keywords
MECHANICAL-PROPERTIES; MICROSCOPE; NANOINDENTATION; LITHOGRAPHY; DESIGN; TESTER; STAGE; FILMS
Issue Date
2007-04
Publisher
AMER INST PHYSICS
Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v. 78, No. 4, Page. 045102
Abstract
This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 mu N to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining.
URI
https://aip.scitation.org/doi/abs/10.1063/1.2719622https://repository.hanyang.ac.kr/handle/20.500.11754/106405
ISSN
0034-6748
DOI
10.1063/1.2719622
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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