Development of a precision indentation and scratching system with a tool force and displacement control module
- Title
- Development of a precision indentation and scratching system with a tool force and displacement control module
- Author
- 조남규
- Keywords
- MECHANICAL-PROPERTIES; MICROSCOPE; NANOINDENTATION; LITHOGRAPHY; DESIGN; TESTER; STAGE; FILMS
- Issue Date
- 2007-04
- Publisher
- AMER INST PHYSICS
- Citation
- REVIEW OF SCIENTIFIC INSTRUMENTS, v. 78, No. 4, Page. 045102
- Abstract
- This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 mu N to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining.
- URI
- https://aip.scitation.org/doi/abs/10.1063/1.2719622https://repository.hanyang.ac.kr/handle/20.500.11754/106405
- ISSN
- 0034-6748
- DOI
- 10.1063/1.2719622
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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