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High-Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition

Title
High-Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition
Author
좌용호
Keywords
atomic layer deposition; gas sensor; hydrogen; oxide heterostructure; thin film
Issue Date
2018-12
Publisher
WILEY-V C H VERLAG GMBH
Citation
ADVANCED FUNCTIONAL MATERIALS, v. 29, No. 7, Article no. 1807760
Abstract
A high-performance, transparent, and extremely thin (<15 nm) hydrogen (H 2 ) gas sensor is developed using 2D electron gas (2DEG) at the interface of an Al 2 O 3 /TiO 2 thin film heterostructure grown by atomic layer deposition (ALD), without using an epitaxial layer or a single crystalline substrate. Palladium nanoparticles (≈2 nm in thickness) are used on the surface of the Al 2 O 3 /TiO 2 thin film heterostructure to detect H 2 . This extremely thin gas sensor can be fabricated on general substrates such as a quartz, enabling its practical application. Interestingly, the electron density of the Al 2 O 3 /TiO 2 thin film heterostructure can be tailored using ALD process temperature in contrast to 2DEG at the epitaxial interfaces of the oxide heterostructures such as LaAlO 3 /SrTiO 3 . This tunability provides the optimal electron density for H 2 detection. The Pd/Al 2 O 3 /TiO 2 sensor detects H 2 gas quickly with a short response time of <30 s at 300 K which outperforms conventional H 2 gas sensors, indicating that heating modules are not required for the rapid detection of H 2 . A wide bandgap (>3.2 eV) with the extremely thin film thickness allows for a transparent sensor (transmittance of 83% in the visible spectrum) and this fabrication scheme enables the development of flexible gas sensors. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
URI
https://onlinelibrary.wiley.com/doi/full/10.1002/adfm.201807760https://repository.hanyang.ac.kr/handle/20.500.11754/105799
ISSN
1616-301X
DOI
10.1002/adfm.201807760
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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