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The Effects of Ar Addition to O2 Plasma on the Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films

Title
The Effects of Ar Addition to O2 Plasma on the Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films
Author
김우희
Keywords
atomic layer deposition; O-2/Ar plasma; oxide thin films; enhanced growth rates; high-energy electron temperature; increased plasma density
Issue Date
2018-10
Publisher
AMER CHEMICAL SOC
Citation
ACS APPLIED MATERIALS & INTERFACES, v. 10, No. 46, Page. 40286-40293
Abstract
A method for significantly increasing the growth rates (GRs) of high-k oxide thin films grown via plasma enhanced atomic layer deposition (PE-ALD) by enhancing the plasma density through the addition of Ar gas to the O-2 plasma oxidant was developed. This approach led to improvements of, similar to 60% in the saturation GRs of PE-ALD ZrO2, HfO2, and SiO2. Furthermore, despite the significantly higher GR enabled by PE-ALD, the mechanical and dielectric properties of the PE-ALD oxide films were similar or even superior to those of films grown via the conventional O-2 plasma process. Optical emission spectroscopy analyses in conjunction with theoretical calculation of the electron energy distribution function revealed that adding Ar gas to the O-2 plasma increased the density of high-energy electrons, thereby generating more O-2 plasma species, such as ions and radicals, which played a key role in improving the GRs and the properties of the films. This promising approach is expected to facilitate the high-volume manufacturing of films via PE-ALD, especially for use as gate insulators in thin-film transistor-based devices in the display industry.
URI
https://pubs.acs.org/doi/abs/10.1021/acsami.8b14244https://repository.hanyang.ac.kr/handle/20.500.11754/105743
ISSN
1944-8244
DOI
10.1021/acsami.8b14244
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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