TY - JOUR AU - 윤종승 DA - 2015/07 PY - 2015 UR - http://jes.ecsdl.org/content/162/10/A2080.short UR - http://hdl.handle.net/20.500.11754/26538 AB - 320-nm-thick LiZr2(PO4)(3) thin film was prepared by radio frequency sputtering and thermally annealed up to 1000 degrees C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800 degrees C was 1.3 x 10(-7) S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 x 10(-6) S/cm above 100 degrees C. It was demonstrated that combined with chemical stability of LiZr2(PO4)(3) and low electronic conductivity, the LiZr2(PO4)(3) thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature. (C) 2015 The Electrochemical Society. All rights reserved. PB - ELECTROCHEMICAL SOC INC KW - LITHIUM LANTHANUM TITANATE KW - IONIC-CONDUCTIVITY KW - BATTERIES KW - STATE KW - MICROBATTERIES KW - MOBILITY KW - NASICON TI - Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte IS - 10 VL - 162 DO - 10.1149/2.0501510jes T2 - JOURNAL OF THE ELECTROCHEMICAL SOCIETY ER -