TY - JOUR AU - 오혜근 DA - 2002/10 PY - 2002 UR - https://www.jkps.or.kr/journal/view.html?uid=5091&vmd=Full UR - https://repository.hanyang.ac.kr/handle/20.500.11754/157676 AB - Most people consider bulk images of chemically amplied resists (CAR) are to be the same as those of non-CAR. However, the physical, the chemical, and the optical behaviors of CAR are different from those of non-CAR. In this study, the intensity and the acid distributions for CAR and non-CAR are simulated and compared by using the vertical propagation model, the standard model (or the defocus model), the second-order correction model, and the full scalar model. To discuss and analyze the intensity and the acid distributions, we calculate aerial images of the projection lens systems by using scalar diffraction theory. We find that because of the dierent models and changes in the simulation parameters, the standing wave eects of CAR and non-CAR behave differently. The simulation results show good agreement with the results of a commercial tool. PB - KOREAN PHYSICAL SOC(한국물리학회) KW - Aerial image KW - Projection lens system KW - Bulk image KW - Scalar model KW - Vertical propagation KW - Defocus model KW - Acid distribution KW - CAR TI - Bulk Image Formation of Scalar Modeling in a Photoresist T2 - JOURNAL OF THE KOREAN PHYSICAL SOCIETY ER -