박관규
2018-11-05T00:54:37Z
2018-11-05T00:54:37Z
2016-09
2016 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), Page. 1-4
978-1-4673-9897-8
1948-5727
https://ieeexplore.ieee.org/document/7728696?arnumber=7728696&SID=EBSCO:edseee
https://repository.hanyang.ac.kr/handle/20.500.11754/79110
Capacitive micromachined ultrasonic transducers (CMUTs) make extremely sensitive chemical sensors in air. In this work, we demonstrate a CMUT chemical sensor chip with integrated temperature and pressure sensors. These sensors allow the measurement of multiple environmental parameters using a single chip and allow the influence of temperature and pressure on the chemical sensors to be corrected for. Additionally, the CMUTs are designed to have low charging. We demonstrate the use the temperature sensor to correct for resonance frequency variations due to temperature. With temperature correction, we measure the drift of two chemical sensors to be 19 parts per million and 59 parts per million over 12 hours. This is progress towards being able to make continuous measurements with the chemical sensor without comparing to a reference gas.
This research was supported by Fluenta AS, Norway. The CMUT devices were fabricated at the Stanford Nanofabrication Facility (Stanford, CA).
en
IEEE
CMUT
Chemical Sensor
Pressure Sensor
Temperature
Stability
CMUT Chip with Integrated Temperature and Pressure Sensors
Article
10.1109/ULTSYM.2016.7728696
1-4
Stedman, Quintin
Park, Kwan Kyu
Khuri-Yakub, Butrus T.
S
COLLEGE OF ENGINEERING[S]
DIVISION OF MECHANICAL ENGINEERING
kwankyu