소홍윤
2018-07-27T06:26:10Z
2018-07-27T06:26:10Z
2016-06
APPLIED SURFACE SCIENCE, v. 387. pae.280-284
0169-4332
1873-5584
https://www.sciencedirect.com/science/article/pii/S0169433216312053
https://repository.hanyang.ac.kr/handle/20.500.11754/73606
Rapid, cost-effective, and simple fabrication/packaging of microscale gallium nitride (GaN) ultraviolet (UV) sensors are demonstrated using zinc oxide nanorod arrays (ZnO NRAs) as an antireflective layer and direct bonding of aluminum wires to the GaN surface. The presence of the ZnO NRAs on the GaN surface significantly reduced the reflectance to less than 1% in the UV and 4% in the visible light region. As a result, the devices fabricated with ZnO NRAs and mechanically stable aluminum bonding wires (pull strength of 3-5 gf) showed higher sensitivity (136.3% at room temperature and 148.2% increase at 250 degrees C) when compared with devices with bare (uncoated) GaN surfaces. In addition, the devices demonstrated reliable operation at high temperatures up to 300 degrees C, supporting the feasibility of simple and cost-effective UV sensors operating with higher sensitivity in high-temperature conditions, such as in combustion, downhole, and space exploration applications. (C) 2016 Elsevier B.V. All rights reserved.
The authors are grateful for support from the Stanford Nanofabrication Facility and Stanford Nano Shared Facilities where all devices were fabricated.
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ELSEVIER SCIENCE BV
Gallium nitride
Zinc oxide nanorod
Antireflective coating
Ultraviolet sensors
Direct wire bonding
High temperatures
ZnO nanorod arrays and direct wire bonding on GaN surfaces for rapid fabrication of antireflective, high-temperature ultraviolet sensors
Article
https://doi.org/10.1016/j.apsusc.2016.05.166
APPLIED SURFACE SCIENCE
So, Hongyun
Senesky, Debbie G.
2016002050
S
COLLEGE OF ENGINEERING[S]
DIVISION OF MECHANICAL ENGINEERING
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