이효창
2018-03-10T01:46:32Z
2018-03-10T01:46:32Z
2013-10
PHYSICS OF PLASMAS, 2013, 20(10), P.101607-
1070-664X
1089-7674
http://aip.scitation.org/doi/abs/10.1063/1.4823470
http://hdl.handle.net/20.500.11754/44556
Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented. (C) 2013 AIP Publishing LLC.
This work was partially supported by the SRC (NRF-2010-0029413), National R&D Program (NRF-2010-0020061), CRC (2013K000305), the Basic Science Research Program (NRF-2012R1A1B3001557, NRF-2013R1A6A3A01022941) through the National Research Foundation of Korea (NRF).
en
AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Antennas
Electron energy distribution functions
Inductively coupled plasma
Plasma pressure
Coils
ENERGY DISTRIBUTION FUNCTION
PRESSURE RF DISCHARGE
POWER DEPOSITION
POSITIVE-COLUMN
GAS-DISCHARGES
GLOW-DISCHARGE
TRANSITION
DENSITY
DISTRIBUTIONS
TEMPERATURE
Effect of antenna size on electron kinetics in inductively coupled plasmas
Article
20
10.1063/1.4823470
101607-101612
PHYSICS OF PLASMAS
Lee, Hyo-Chang
Chung, Chin-Wook
2013011695
S
RESEARCH INSTITUTE[S]
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