이관수
2017-08-04T05:42:45Z
2017-08-04T05:42:45Z
2015-10
AEROSOL SCIENCE AND TECHNOLOGY, v. 49, NO 10, Page. 920-927
0278-6826
1521-7388
http://www.tandfonline.com/doi/full/10.1080/02786826.2015.1085952
http://hdl.handle.net/20.500.11754/28304
In this study, the Gaussian Diffusion Sphere Model (GDSM) and the Statistical Lagrangian Particle Tracking (SLPT) approach were employed and adjusted to calculate the local deposition velocity onto a flat plate in horizontal airflow. The GDSM and the SLPT approach were validated by comparing the predicted local deposition velocities with those determined by solving the equation of convective diffusion. Both the GDSM and the SLPT approach were found to be accurate in calculating the local deposition velocity onto a flat plate in horizontal airflow. In addition, the GDSM was much more efficient than the SLPT approach in terms of the calculation time. Finally, a parametric study on the local deposition velocity onto a flat plate exposed to horizontal airflow was performed using the GDSM with the consideration of the effects of the gravity, convection, diffusion, and thermophoresis.
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (grant number: NRF-2013R1A1A1A05010781).
en
TAYLOR & FRANCIS INC
PARTICLE DEPOSITION
SEMICONDUCTOR WAFERS
PARALLEL-FLOW
EUVL MASKS
CLEAN ROOM
SURFACE
ELECTROPHORESIS
DIFFUSION
FIELD
Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis
Article
10
49
10.1080/02786826.2015.1085952
920-927
AEROSOL SCIENCE AND TECHNOLOGY
Woo, Sang-Hee
Lee, Kwan-Soo
Yook, Se-Jin
2015001525
S
COLLEGE OF ENGINEERING[S]
DIVISION OF MECHANICAL ENGINEERING
ksleehy
C-5584-2015
http://orcid.org/0000-0003-0463-8514