안강호
2019-09-05T01:52:24Z
2019-09-05T01:52:24Z
2005-03
반도체및디스플레이장비학회지, v. 4, No. 1, Page. 49 - 53
http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=JAKO200508824106032
https://repository.hanyang.ac.kr/handle/20.500.11754/110249
The nanoparticle deposition chamber, which is used for quantum dot semiconductor memory applications, is designed by means of numerical simulation. In this research, the numerical simulations for deposition chamber were performed by commercial software, FLUENT. The deposition of nanoparticles is calculated by diffusion force, thermophoresis and electrophoresis of particles. As a results, when the diffusion force was considered, the most of particles deposited in the wall of deposition chamber. But as considering thermophoresis and electrophoresis of particles, the particles were deposited wafer surface, perfectly.
ko_KR
반도체및디스플레이장비학회
Deposition Chamber
Diffusion
Electrophoresis
Nanoparticles
Numerical Simulation
Thermophoresis
Wafer
300mm 웨이퍼 위의 에어로졸 나노 입자의 증착장비 개발을 위한 수치 해석적 연구
Numerical Simulation of Deposition Chamber for Aerosol Nanoparticles Upward 300 mm Wafer
Article
한국반도체장비학회지
안강호
안진홍
이관수
임광옥
강윤호
2012210661
E
COLLEGE OF ENGINEERING SCIENCES[E]
DEPARTMENT OF MECHANICAL ENGINEERING
khahn