유홍기
2019-12-08T05:21:21Z
2019-12-08T05:21:21Z
2018-05
JOURNAL OF MICROSCOPY, v. 270, no. 2, page. 200-209
0022-2720
1365-2818
https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12674
https://repository.hanyang.ac.kr/handle/20.500.11754/118814
We propose a multipoint scanning dual-detection confocal microscopy (MS-DDCM) system for fast 3D volumetric measurements. Unlike conventional confocal microscopy, MS-DDCM can accomplish surface profiling without axial scanning. Also, to rapidly obtain 2D images, the MS-DDCM employs a multipoint scanning technique, with a digital micromirror device used to produce arrays of effective pinholes, which are then scanned. The MS-DDCM is composed of two CCDs: one collects the conjugate images and the other collects nonconjugate images. The ratio of the axial response curves, measured by the two detectors, provides a linear relationship between the height of the sample surface and the ratio of the intensity signals. Furthermore, the difference between the two images results in enhanced contrast. The normalising effect of the MS-DDCM provides accurate sample heights, even when the reflectance distribution of the surface varies. Experimental results confirmed that the MS-DDCM achieved high-speed surface profiling with improved image contrast capability.
This work was supported in part by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (NRF-2014H1A2A1021417 and NRF-2014R1A2A1A10050330).
en_US
WILEY
Confocal microscopy
fast imaging
height measurements
surface measurement
three-dimensional microscopy
Multipoint scanning dual-detection confocal microscopy for fast 3D volumetric measurement
Article
2
270
10.1111/jmi.12674
200-209
JOURNAL OF MICROSCOPY
Lee, D.
Gweon, D. -G.
Yoo, H.
2018002241
S
COLLEGE OF ENGINEERING[S]
DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING
hyoo
http://orcid.org/0000-0001-9819-3135