최낙삼
2019-06-11T04:59:15Z
2019-06-11T04:59:15Z
2007-04
REVIEW OF SCIENTIFIC INSTRUMENTS, v. 78, No. 4, Page. 045102
0034-6748
https://aip.scitation.org/doi/abs/10.1063/1.2719622
https://repository.hanyang.ac.kr/handle/20.500.11754/106404
This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 mu N to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining.
en_US
AMER INST PHYSICS
MECHANICAL-PROPERTIES
MICROSCOPE
NANOINDENTATION
LITHOGRAPHY
DESIGN
TESTER
STAGE
FILMS
Development of a precision indentation and scratching system with a tool force and displacement control module
Article
10.1063/1.2719622
REVIEW OF SCIENTIFIC INSTRUMENTS
Park, Jae-jun
Kwon, Kihwan
Bang, Jinhyeok
Cho, Nahmgyoo
Han, Chang-soo
Choi, Nak-sam
2007208268
E
COLLEGE OF ENGINEERING SCIENCES[E]
DEPARTMENT OF MECHANICAL ENGINEERING
nschoi