정진욱
2019-04-15T00:57:52Z
2019-04-15T00:57:52Z
2016-12
PHYSICS OF PLASMAS, v. 23, Issue 12, No. 123508
1070-664X
1089-7674
https://aip.scitation.org/doi/10.1063/1.4969089
https://repository.hanyang.ac.kr/handle/20.500.11754/101844
Particle and power balance equations including stepwise ionizations are derived and solved in helium plasmas. In the balance equations, two metastable states (2(1)S(1) in singlet and 2(3)S(1) triplet) are considered and the followings are obtained. The plasma density linearly increases and the electron temperature is relatively in a constant value against the absorbed power. It is also found that the contribution to multi-step ionization with respect to the single-step ionization is in the range of 8%-23%, as the gas pressure increases from 10 mTorr to 100 mTorr. Compared to the results in the argon plasma, there is little variation in the collisional energy loss per electron-ion pair created (epsilon(c)) with absorbed power and gas pressure due to the small collision cross section and higher inelastic collision threshold energy. Published by AIP Publishing.
The authors thank to an anonymous reviewer for the helpful comment. This research was supported by the National R&D Program (NRF-2014M1A7A1A03045185), and the development of the future semiconductor device program of MOTIE and KSRC (10052861), Korea Research Institute of Standard and Science (KRISS), and the R&D Convergence Program (CAP-16-04-KRISS).
en
AMER INST PHYSICS
ELECTRON-ENERGY DISTRIBUTION
INDUCTIVELY-COUPLED PLASMA
HIGH-DENSITY
DISCHARGE
Global model including multistep ionizations in helium plasmas
Article
12
23
10.1063/1.4969089
1-7
PHYSICS OF PLASMAS
Oh, Seung-Ju
Lee, Hyo-Chang
Chung, Chin-Wook
2016001793
S
COLLEGE OF ENGINEERING[S]
DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING
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