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Showing results 1 to 20 of 123

Issue DateTitleAuthor(s)
2011-03Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas정진욱
2012-12Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge정진욱
2014-07Colorimetric polydiacetylene for plasma diagnostics정진욱
2012-12Comparisons of the electrical characteristics by impedance matching conditions on the E-H and H-E transition and the hysteresis of inductively coupled plasma정진욱
2018-05Compensation of the sheath effects in cylindrical floating probes정진욱
2020-07Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma정진욱
2014-09Control of electron energy distribution by adding a pulse inductive field in capacitive discharge정진욱
2013-05Control of plasma density distribution via wireless power transfer in an inductively coupled plasma정진욱
2015-03Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting정진욱
2015-03Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting정진욱
2015-07Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma정진욱
2016-06Control of the floating potential using dual-frequency정진욱
2021-02Control of the spatial distribution of ion flux in dual inductively coupled plasmas정진욱
2015-08Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas정진욱
2021-02Correlation of RF impedance with Ar plasma parameters in semiconductor etch equipment using inductively coupled plasma정진욱
2011-06Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy정진욱
2011-05Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma정진욱
2016-06Discharge dynamics and plasma density recovery by on/off switches of additional gas정진욱
2013-06Discharge mode transition and hysteresis in inductively coupled plasma정진욱
2012-05Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas정진욱