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Showing results 1 to 30 of 83

Issue DateTitleAuthor(s)
2008-0232 nm 1:1 line and space patterning by resist reflow process안일신
2001-02Adsorption of water molecules on stainless steel surface using null ellipsometry안일신
2004-12Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films안일신
2003-12Aerial Image prediction for mask defect in extreme ultraviolet lithography안일신
2001-08Alignment and Calibration of the MgF2 Biplate Compensator for Applications in Rotating Compensator Multichannel Ellipsometry안일신
2000-02Alignment of Zero-Order Retardation Plate for Spectroscopic Ellipsometry안일신
2004-05Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry안일신
2008-06Anisotropic resist reflow process simulation for 22 nm elongated contact holes안일신
2008-04Application of ellipsometry in immersion lithography안일신
2015-05Application of imaging ellipsometry to the detection of latent fingermarks안일신
2005-06Bulk Effects of Thermal Flow Resists안일신
2004-05Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer안일신
2005-06Calibration-Free Multichannel Ellipsometry for Retardance Measurement안일신
2001-02Calibrations in rotating compensator spectroscopic ellipsometry안일신
2018-04Characterization of Free-Standing Nano-Membranes by Using Ellipsometry안일신
2006-11Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns안일신
2019-10Comparison Imaging Ellipsometry and its Application to Crystallization of Indium Oxide Thin Films안일신
2018-03Comparison null imaging ellipsometry using polarization rotator안일신
2005-06Determination of the Optical Functions of Various Liquids by Rotating Compensator Multichannel Spectroscopic Ellipsometry안일신
2007-08Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer안일신
2017-10Development of micro-spot spectroscopic ellipsometer using reflective objectives안일신
2002-06Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer안일신
2008-10Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films안일신
2004-06Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall안일신
2006-02The Effect of Transmission Reduction by Reticle Haze Formation안일신
2008-02Ellipsometric inspection of the inner surface of pellicle-covered masks안일신
2007-03Ellipsometric studies of the absorption of liquid by photo resist안일신
2008-08Ellipsometry for Pellicle-Covered Surface안일신
2006-05Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구안일신
2003-12Ellipsometry에서의 calibration 및 입사면 고정형 ellipsometer안일신