2020-06 | The adsorption and removal of corrosion inhibitors during metal CMP | 김태곤 |
2016-09 | Atomic resolution quality control for Fin oxide recess by atomic resolution profiler | 김태곤 |
2023-02 | Boosting performance of CdTe photocathode with pulse-reverse electrodeposited nickel telluride-nickel phosphide dual co-catalysts | 김태곤 |
2020-07 | Characterization of Different Cobalt Surfaces and Interactions with Benzotriazole for CMP Application | 김태곤 |
2022-01 | Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant | 김태곤 |
2020-10 | Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process | 김태곤 |
2020-12 | Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process | 김태곤 |
2021-02 | Effect of Dissolved Oxygen on Removal of Benzotriazole from Co During a Post-Co CMP Cleaning | 김태곤 |
2022-05 | Effect of pH and Ion Concentration on Wetting of Nanoholes and Water Structuring | 김태곤 |
2022-05 | Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning | 김태곤 |
2022-08-22 | Effect of Slurry Additives on Co-BTA Complex Stability and Inhibition Property During Co CMP Process | 김태곤 |
2022-11-15 | Effect of slurry particles on PVA brush contamination during post-CMP cleaning | 김태곤 |
2021-02 | The Effect of Thermal Aging on Nano-Particle Removal | 김태곤 |
2021-02 | Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND | 김태곤 |
2020-02 | Hybrid DHF and N-2 jet spray cleaning for silicon nitride and metal layer DRAM patterns | 김태곤 |
2016-10 | In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope | 김태곤 |
2019-10 | Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process | 김태곤 |
2023-08 | Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing | 김태곤 |
2021-04 | Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning | 김태곤 |
2021-02 | Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process | 김태곤 |