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Showing results 80 to 84 of 84

Issue DateTitleAuthor(s)
2001-07Thickness Reduction Effect in a Chemically Amplified Resit Simulator안일신
2003-06Threshold energy resist model for critical dimension prediction안일신
2003-06Use of Rotating Compensator Spectroscopic Ellipsometry for Line-width Control안일신
2003-02Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer안일신
2003-12분광 엘립소미트리를 이용한 유리기판 위의 박막분석안일신

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