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Showing results 18 to 21 of 21

Issue DateTitleAuthor(s)
2017-06Structural, chemical, and electrical properties of Y2O3 thin films grown by atomic layer deposition with an (iPrCp)2Y(iPr-amd) precursor박인성
2019-09Synthesis of Ag-ZnO core-shell nanoparticles with enhanced photocatalytic activity through atomic layer deposition박인성
2017-02Uniform dehydrogenation of amorphous silicon thin films using a wide thermal annealing system박인성
2017-04ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3 /C7H8 precursor and ozone박인성
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