나노임프린팅 공정 기술을 이용한 이차원의 광결정 제작 및 온도 감지 코팅 필름

Abstract

The purpose of this study is to fabricate a coating film that can be easily and intuitively observed when heated above a specific temperature and use it in a temperature sensing device. Two - dimensional photonic crystal structures were fabricated to express the structural color and a polymer film was coated on the photonic crystal structure to prepare a coating film. After patterning on a silicon wafer with E-beam lithography technology, it is transferred using a curable polymer such as PUA or PDMS, and a polymer film with a thickness of a few hundred nanometers is coated on the mold. If the surface temperature of the coating film is heated above the melting point of the polymer film, they will melt and penetrate into the pores of the nanostructures below, resulting in a refractive index matching between the two materials. As the refractive index matching occurs, the coating film no longer shows structural color and changes to transparent.