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dc.contributor.author안일신-
dc.date.accessioned2018-12-26T06:26:28Z-
dc.date.available2018-12-26T06:26:28Z-
dc.date.issued2018-04-
dc.identifier.citationJOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 72, No. 8, Page. 868-872en_US
dc.identifier.issn0374-4884-
dc.identifier.urihttps://link.springer.com/article/10.3938/jkps.72.868-
dc.identifier.urihttp://repository.hanyang.ac.kr/handle/20.500.11754/81019-
dc.description.abstractThe thickness of the pellicle is only a few tens of microns in extreme ultraviolet lithography (EUVL). This is because the absorption loss by the pellicle is high. Thus, the thickness and contamination on the surface of the EUVL pellicle are important factors for controlling the transmission of EUV light. In this work, we fabricate ultra-thin silicon-nitride membranes for EUVL pellicles and use micro-spot spectroscopic ellipsometry and imaging ellipsometry for characterization. We successfully deduce not only the thickness but also the optical function of the membrane. However, we found that some precautions were required for accurate measurement of the free-standing thin membranes by using ellipsometry. Issues related to the vibration of the membrane and the sensitivity of the measurement are discussed.en_US
dc.description.sponsorshipThis work was supported by the Future Semiconductor Device Technology Development Program (10049185) funded by the MOTIE (Ministry of Trade, Industry & Energy) and the KSRC (Korea Semiconductor Research Consortium).en_US
dc.language.isoen_USen_US
dc.publisherKOREAN PHYSICAL SOCen_US
dc.subjectExtreme UVen_US
dc.subjectLithographyen_US
dc.subjectPellicleen_US
dc.subjectMembraneen_US
dc.subjectEllipsometryen_US
dc.subjectPELLICLEen_US
dc.titleCharacterization of Free-Standing Nano-Membranes by Using Ellipsometryen_US
dc.typeArticleen_US
dc.identifier.doi10.3938/jkps.72.868-
dc.relation.page868-872-
dc.relation.journalJOURNAL OF THE KOREAN PHYSICAL SOCIETY-
dc.contributor.googleauthorPark, Sungmo-
dc.contributor.googleauthorLee, Changho-
dc.contributor.googleauthorAn, Ilsin-
dc.contributor.googleauthorKim, Min-Su-
dc.contributor.googleauthorPark, Jin-Goo-
dc.contributor.googleauthorAhn, Jin-ho-
dc.relation.code2018000435-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E]-
dc.sector.departmentDEPARTMENT OF PHOTONICS AND NANOELECTRONICS-
dc.identifier.pidilsin-


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