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Comparison null imaging ellipsometry using polarization rotator

Title
Comparison null imaging ellipsometry using polarization rotator
Author
안일신
Keywords
IN-SITU; MEMBRANES; LAYERS; VISUALIZATION; INTERFACE; FILMS
Issue Date
2018-03
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v. 57, No. 5, Article no. 052501
Abstract
In this study, two-reflection imaging ellipsometry is carried out to compare the changes in polarization states between two samples. By using a polarization rotator, the parallel and perpendicular components of polarization are easily switched between the two samples being compared. This leads to an intensity image consisting of and off- points depending on the difference in optical characteristics between the two samples. This technique does not require any movement of optical elements for ing and can be used to detect defects or surface contamination for quality control of samples. (C) 2018 The Japan Society of Applied Physics
URI
http://iopscience.iop.org/article/10.7567/JJAP.57.052501/metahttp://repository.hanyang.ac.kr/handle/20.500.11754/80960
ISSN
0021-4922
DOI
10.7567/JJAP.57.052501
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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