볼렌즈를 이용한 광학식 진직도 측정시스템

Title
볼렌즈를 이용한 광학식 진직도 측정시스템
Other Titles
Optical Straightness Measuring System Using a Ball-lens
Author
조남규
Keywords
Linear stage (선형이송기구);Geometric error motion (기하학적 오차운동);Straightness measurement (진직도 측정);Ball-lens (볼렌즈);Measurement sensitivity (측정 감도)
Issue Date
2014-12
Publisher
한국정밀공학회
Citation
한국정밀공학회지, v. 31, no. 12, page. 1133-1139
Abstract
This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a two-dimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.
URI
http://repository.hanyang.ac.kr/handle/20.500.11754/79866https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART001930751
ISSN
1225-9071
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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