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Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization

Title
Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization
Author
박재근
Keywords
FILM; Adsorption affinity; Alkaline media; Corrosion inhibition; Inhibition effect; Nonionic polymers; Polyacrylamides; Polycrystalline; Polyvinyl pyrrolidone; Potentiodynamic polarization curves
Issue Date
2011-09
Publisher
ELECTROCHEMICAL SOC INC, 65 SOUTH MAIN STREET, PENNINGTON, NJ 08534 USA
Citation
Electrochemical and Solid-State Letters, Vol.14, No.11 [2011], p H450-H452
Abstract
The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media.
URI
http://esl.ecsdl.org/content/14/11/H450http://repository.hanyang.ac.kr/handle/20.500.11754/74717
ISSN
1099-0062
DOI
10.1149/2.007111esl
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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