3-D airborne ultrasound synthetic aperture imaging based on capacitive micromachined ultrasonic transducers

Title
3-D airborne ultrasound synthetic aperture imaging based on capacitive micromachined ultrasonic transducers
Author
박관규
Keywords
Airbone ultrasound; Capacitive micromachined ultrasonic transducer (CMUT); 3D imaging
Issue Date
2013-11
Publisher
Elsevier Science B.V., Amsterdam.
Citation
ULTRASONICS, 권: 53, 호: 7, 페이지: 1355-1362
Abstract
In this paper, we present an airborne 3-D volumetric imaging system based on capacitive micromachined ultrasonic transducers (CMUTs). For this purpose we fabricated 89-kHz CMUTs where each CMUT is made of a circular single-crystal silicon plate with a radius of 1 mm and a thickness of 20 mu m, which is actuated by electrostatic force through a 20-mu m vacuum gap. The measured transmit sensitivity at 300-V DC bias is 14.6 Pa/V and 24.2 Pa/V, when excited by a 30-cycle burst and a continuous wave, respectively. The measured receive sensitivity at 300-V DC bias is 16.6 mV/Pa (-35.6 dB re 1 V/Pa) for a 30-cycle burst. A 26 x 26 2-D array was implemented by mechanical scanning a co-located transmitter and receiver using the classic synthetic aperture (CSA) method. The measurement of a 1.6 lambda-size target at a distance of 500 mm presented a lateral resolution of 3.17 degrees and also showed good agreement with the theoretical point spread function. The 3-D imaging of two plates at a distance of 350 mm and 400 mm was constructed to exhibit the capability of the imaging system. This study experimentally demonstrates that a 2-D CMUT array can be used for practical 3-D imaging applications in air, such as a human-machine interface. (C) 2013 Elsevier B. V. All rights reserved.
URI
https://www.sciencedirect.com/science/article/pii/S0041624X1300098X?via%3Dihubhttp://repository.hanyang.ac.kr/handle/20.500.11754/73259
ISSN
0041-624X
DOI
10.1016/j.ultras.2013.04.003
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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