68 0

Full metadata record

DC FieldValueLanguage
dc.contributor.author정진욱-
dc.date.accessioned2018-07-25T01:16:38Z-
dc.date.available2018-07-25T01:16:38Z-
dc.date.issued2011-04-
dc.identifier.citationCURRENT APPLIED PHYSICS,권: 11 호: 5 페이지: S149-S153en_US
dc.identifier.issn1567-1739-
dc.identifier.issn1878-1675-
dc.identifier.urihttps://www.sciencedirect.com/science/article/pii/S1567173911002203?via%3Dihub-
dc.identifier.urihttp://repository.hanyang.ac.kr/handle/20.500.11754/72800-
dc.description.abstractA study of the E-H mode transition was performed in Ar, O-2, N-2, and mixture gas inductively coupled plasma (ICP) from the measurement of the electron energy distribution function (EEDF). Changes of the EEDF and characteristics of the discharge on the E-H mode transition were discussed. At each E-mode, the measured EEDFs had different shapes depending on the gas type and pressure, while the EEDFs evolved into Maxwellian distribution with the E-H transition due to electron-electron collisions. This study was also focused on the transition ICP power when the discharge transits from E-mode to H-mode. As the ICP power increased in Ar discharge, the transition ICP power had minimum value at a particular pressure, while the transition ICP power was gradually increased with gas pressures in molecule gas discharge. The transition ICP power with gas mixing ratios was also studied in Ar/O-2/N-2 mixture gas discharge.en_US
dc.description.sponsorshipThis work was supported by the SRC (2010-0029418) and the Basic Science Research Program (2010-0015866) of Research Foundation of Korea (NRF) grant funded by the Korea government (MEST).en_US
dc.language.isoenen_US
dc.publisherELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDSen_US
dc.subjectInductively coupled plasmaen_US
dc.subjectE-H mode transitionen_US
dc.subjectInductive modeen_US
dc.subjectCapacitive modeen_US
dc.subjectElectron energy distributionen_US
dc.titleE-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gasen_US
dc.typeArticleen_US
dc.relation.no5-
dc.relation.volume11-
dc.identifier.doi10.1016/j.cap.2011.04.009-
dc.relation.page149-153-
dc.relation.journalCURRENT APPLIED PHYSICS-
dc.contributor.googleauthorLee, Jung-Kyu-
dc.contributor.googleauthorLee, Hyo-Chang-
dc.contributor.googleauthorChung, Chin-Wook-
dc.relation.code2011216223-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING-
dc.identifier.pidjoykang-
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE