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Photo-patternable high-k ZrOx dielectrics prepared using zirconium acrylate for low-voltage-operating organic complementary inverters

Title
Photo-patternable high-k ZrOx dielectrics prepared using zirconium acrylate for low-voltage-operating organic complementary inverters
Author
장재영
Keywords
Organic field-effect transistors (OFETs); Zirconium oxide; Zirconium acrylate; Complementary inverters; Low voltages; Solution processes
Issue Date
2016-06
Publisher
ELSEVIER SCIENCE BV
Citation
ORGANIC ELECTRONICS, v. 33, Page. 40-47
Abstract
Solution-processed dielectric materials with a high dielectric constant (k) have attracted considerable attention due to their potential applications in low-voltage-operating organic field-effect transistors (OFETs) for realizing large-area and low-power electronic devices. In terms of device commercialization, the patterning of each film component via a facile route is an important issue. In this study, we introduce a photo-patternable precursor, zirconium acrylate (ZrA), to fabricate photo-patterned high-k zirconium oxide (ZrOx) dielectric layers with UV light. Solution-processed ZrA films were effectively micro-patterned with UV exposure and developing, and transitioned to ZrOx through a sol-gel reaction during deep-UV annealing. The UV-assisted and similar to 10 nm-thick ZrOx dielectric films exhibited a high capacitance (917.13 nF/cm(2) at 1 KHz) and low leakage current density (10(-7) A/cm(2) at 1.94 MV/cm). Those films could be utilized as gate dielectric layers of OFETs after surface modification with ultrathin cyclic olefin copolymer layers. Finally, we successfully fabricated organic complementary inverters exhibiting hysteresis-free operation and high voltage gains of over 42 at low voltages of ˂= 3 V. (C) 2016 Elsevier B.V. All rights reserved.
URI
https://www.sciencedirect.com/science/article/pii/S1566119916300921?via%3Dihubhttp://repository.hanyang.ac.kr/handle/20.500.11754/71874
ISSN
1566-1199; 1878-5530
DOI
https://doi.org/10.1016/j.orgel.2016.03.005
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ENERGY ENGINEERING(에너지공학과) > Articles
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