Self-Refreshing Characteristics of an Airborne Particle Sensor Using a Bridged Paddle Oscillator

Abstract

We report on the self-refreshing characteristics of a micromachined airborne particle sensor. The sensor consists of a bridge-type beam having an oscillating paddle-type particle collector at its center. When a positive potential is applied to the paddle, the sensor is able to attract and collect negatively charged airborne particles while oscillating close to its resonant frequency and thereby measure their density from the change in the oscillating phase at 10 pg resolution. When the applied potential is removed, the collected particles are detached from the sensor due to momentum transfer from the oscillating paddle, thus demonstrating a self-refreshing capability.